Preparation and Characterization of p-Styrenesulfonates of Isopropylidene Dicyclohexanol as Acid Amplifiers to Enhance the Photosensitivity of Positive-Working Photoresists
Preparation and Characterization of p-Styrenesulfonates of Isopropylidene Dicyclohexanol as Acid Amplifiers to Enhance the Photosensitivity of Positive-Working Photoresists
The photosensitivity enhancement of photoresist achieved by the addition of acid amplifiers stems from the autocatalytic decomposition of the acid amplifiers triggered by acidic species generated from a photoacid gen-erator. In this research we synthesized and evaluated 4-hydroxy-4'-p-styrenesulfonyloxy isopropylidene dicyclohex-ane(1), 4,4'-di-p-styrenesulfonyloxy isopropylidene dicyclohexane(2) and 4-p-styrenesulfonyloxy-4'-tosyloxy isopropylidene dicyclohexane(3) as novel acid amplifiers. These acid amplifiers(1-3) showed reasonable thermal stability for resist pro-cessing temperature. As estimated by the sensitivity curve, 1-3 were 2X-12X sensitive than poly(tert-butyl meth-acrylate) film in the presence of a photoacid generator and, therefore, provides practical applicability for photoimaging.
Citing 'Preparation and Characterization of p-Styrenesulfonates of Isopropylidene Dicyclohexanol as Acid Amplifiers to Enhance the Photosensitivity of Positive-Working Photoresists
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@article{ JCGMDC_2002_v46n5_437}
,title={Preparation and Characterization of p-Styrenesulfonates of Isopropylidene Dicyclohexanol as Acid Amplifiers to Enhance the Photosensitivity of Positive-Working Photoresists}
,volume={5}
, url={http://dx.doi.org/10.5012/jkcs.2002.46.5.437}, DOI={10.5012/jkcs.2002.46.5.437}
, number= {5}
, journal={Journal of the Korean Chemical Society}
, publisher={Korean Chemical Society}
, author={Eun-Ju, Lee
and
Kyong-Il, Hong
and
Kwon-Taek, Im
and
Yong-Seok, Jeong
and
Seong-Su, Hong
and
Yeon-Tae, Jeong}
, year={2002}
, month={Oct}
TY - JOUR
T2 - Journal of the Korean Chemical Society
AU - Eun-Ju, Lee
AU - Kyong-Il, Hong
AU - Kwon-Taek, Im
AU - Yong-Seok, Jeong
AU - Seong-Su, Hong
AU - Yeon-Tae, Jeong
SN - 1017-2548
TI - Preparation and Characterization of p-Styrenesulfonates of Isopropylidene Dicyclohexanol as Acid Amplifiers to Enhance the Photosensitivity of Positive-Working Photoresists
VL - 46
PB - Korean Chemical Society
DO - 10.5012/jkcs.2002.46.5.437
PY - 2002
UR - http://dx.doi.org/10.5012/jkcs.2002.46.5.437
ER -
Eun-Ju, L.
,
Kyong-Il, H.
,
Kwon-Taek, I.
,
Yong-Seok, J.
,
Seong-Su, H.
,
&
Yeon-Tae, J.
( 2002).
Preparation and Characterization of p-Styrenesulfonates of Isopropylidene Dicyclohexanol as Acid Amplifiers to Enhance the Photosensitivity of Positive-Working Photoresists.
Journal of the Korean Chemical Society,
46
(5)
Korean Chemical Society.
doi:10.5012/jkcs.2002.46.5.437
Eun-Ju, L
et al.
2002,
Preparation and Characterization of p-Styrenesulfonates of Isopropylidene Dicyclohexanol as Acid Amplifiers to Enhance the Photosensitivity of Positive-Working Photoresists,
Journal of the Korean Chemical Society,
vol. 5,
no. 5,
Retrieved from http://dx.doi.org/10.5012/jkcs.2002.46.5.437
[1]
L Eun-Ju
,
H Kyong-Il
,
I Kwon-Taek
,
J Yong-Seok
,
H Seong-Su
,
and
J Yeon-Tae
,
“Preparation and Characterization of p-Styrenesulfonates of Isopropylidene Dicyclohexanol as Acid Amplifiers to Enhance the Photosensitivity of Positive-Working Photoresists”,
Journal of the Korean Chemical Society,
vol. 5,
no. 5,
Oct
2002.
Eun-Ju, Lee
Kyong-Il, Hong
Kwon-Taek, Im
et al.
“Preparation and Characterization of p-Styrenesulfonates of Isopropylidene Dicyclohexanol as Acid Amplifiers to Enhance the Photosensitivity of Positive-Working Photoresists”
Journal of the Korean Chemical Society,
5.
5
2002:
Eun-Ju, L
,
Kyong-Il, H
,
Kwon-Taek, I
,
Yong-Seok, J
,
Seong-Su, H
,
Yeon-Tae, J
Preparation and Characterization of p-Styrenesulfonates of Isopropylidene Dicyclohexanol as Acid Amplifiers to Enhance the Photosensitivity of Positive-Working Photoresists.
Journal of the Korean Chemical Society
[Internet].
2002.
Oct ;
5
(5)
Available from http://dx.doi.org/10.5012/jkcs.2002.46.5.437
Eun-Ju, Lee
,
Kyong-Il, Hong
,
Kwon-Taek, Im
,
Yong-Seok, Jeong
,
Seong-Su, Hong
,
and
Yeon-Tae, Jeong
,
“Preparation and Characterization of p-Styrenesulfonates of Isopropylidene Dicyclohexanol as Acid Amplifiers to Enhance the Photosensitivity of Positive-Working Photoresists.”
Journal of the Korean Chemical Society
5
no.5
()
Oct,
2002):
http://dx.doi.org/10.5012/jkcs.2002.46.5.437
