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Analysis of Trace Impurities in The Bulk <TEX>$H_2$</TEX> and He Gases by a Cold Concentration Method
Analysis of Trace Impurities in The Bulk $H_2$ and He Gases by a Cold Concentration Method
Journal of the Korean Chemical Society. 1998. Oct, 42(5): 526-530
  • Published : October 00, 1998
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Lee, Taeck Hong
Park, Doo Seon
Son, Moo Ryong

Abstract
Analysis of trace impurities in the gases has been very important with the development of semi-conductor related industry. Particularly, the contamination of the gas handling systems in a semi-conductor plant by the air has been a trouble to the manufacturers. Thus, the analysis of the air components in the system has been a task to the analysts. In this study, we report the analysis data with a expanded uncertainty for the trace impurities of nitrogen and argon in the bulk helium and hydrogen. All data show a good correspondence, exhibiting reliable statistical error ranges.?????????��??K?޿????????????6???K?޿